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Lecture|2025年“工程师走进课堂”系列讲座-第七讲-数字全息显微镜DHM在MEMS振动以及四维动态形貌测试中的应用

Thu, Aug 7 2025 01:30 PM 

Date: 2025/08/07

Thur. 14:00 pm-16:00 pm

Meeting Room, Fourth Floor, TICNN, Tianjin University

数字全息显微镜(Digital Holographic Microscopy, 简称DHM)是数字全息技术在显微领域的应用,与其他显微技术不同的是,DHM并不直接记录被观测物体的图像,而是记录含有被观测物体波前信息的全息图,再通过计算机对所记录的全息图进行数值重建来得到被测物体的相位和振幅(光强)信息,进而完成数字三维重构。DHM拥有与激光干涉一样的纵向皮米级测量精度,同时得益于其非扫描全视场成像机制,DHM能够在视频速率190帧/秒下实现实时三维动态成像(或者叫四维成像),而利用超高速相机,甚至能达到1000帧/秒的抓取速率,远超任何三维成像显微系统,是名副其实的全球最快光学三维/四维形貌动态轮廓仪!DHM记录了每个像素点的三维信息,因此能够实现对单个像素点的量化实时跟踪,在测量微系统与微机电系统MEMS的多维振动应用上体现了独一无二的优势。对于离面(Out-of-plane)运动的测量精度达到了皮米级,而对于面内(In-plane)运动的测量精度则可以达到1纳米。DHM同时在四维动态形貌应用领域有着众多应用前景,并能够在气、液、真空、温湿度等多环境下测量样品。

Time-resolved profilometer by Digital Holographic Microscopy (DHM®) enables 3D topography measurements with interferometric resolution, but most importantly at unrivalled short time duration down to 1ms, hence providing unique capability in 4D profilometry. It offers a new perspective for researches and engineers to study the dynamic 3D process in both material science and life science. This presentation will cover latest 4D application examples by DHM.

谢申奇博士

瑞士Lyncee Tec公司亚太市场负责人

谢申奇博士,毕业于瑞士洛桑联邦理工大学EPFL微电子与微系统专业,拥有多年微纳米加工及应用研究经历,瑞士Lyncee Tec公司亚太市场负责人。

Dr. Shenqi Xie received his PhD degree in Microengineering and Microsystems from EPFL, Switzerland. He has over 15years extensive experiences in micro/nano fabrication, specialized in various additive micro engineering techniques, including nanoimprint, stencil lithography, inkjet print, etc. He joined Lyncee Tec from 2015 as Sales Manager taking charge of business development in Asia.



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